000 00456nam a2200193Ia 4500
008 221231s9999 xx 000 0 und d
020 _a978-81-317-6475-6
082 _a621.381LIU
100 _aLiu,Chang
_99118
245 0 _aFoundations MEMS
250 _a2nd ed.
260 _aNoida (U.P)
260 _bPearson
260 _c2017
300 _a560p.
650 _aMechanical
_99119
650 _bFoundations,MEMS,Mechanical
_99120
942 _cBE_BK
999 _c5570
_d5570