| 000 | 00456nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 221231s9999 xx 000 0 und d | ||
| 020 | _a978-81-317-6475-6 | ||
| 082 | _a621.381LIU | ||
| 100 |
_aLiu,Chang _99118 |
||
| 245 | 0 | _aFoundations MEMS | |
| 250 | _a2nd ed. | ||
| 260 | _aNoida (U.P) | ||
| 260 | _bPearson | ||
| 260 | _c2017 | ||
| 300 | _a560p. | ||
| 650 |
_aMechanical _99119 |
||
| 650 |
_bFoundations,MEMS,Mechanical _99120 |
||
| 942 | _cBE_BK | ||
| 999 |
_c5570 _d5570 |
||