000 00437nam a2200157Ia 4500
008 221231s9999 xx 000 0 und d
020 _a978-0-07-048709-3
100 _aHsu Tai -Ran
_96885
245 0 _aMEMS and Microsystems Design and Manufacture
260 _aNew Delhi
260 _bTata McGraw-Hill Education Private Limited
260 _c2011
300 _a436P
650 _aElectronics and Communication
_96886
942 _cBE_BK
999 _c4755
_d4755