000 00405nam a2200157Ia 4500
008 221231s9999 xx 000 0 und d
020 _a0-07-063445-9-X
100 _aHsu, Tai-Ran
_96023
245 0 _aMEMS and Microsystems Design and Manufacture
250 _a8th Rp
260 _bTata McGraw-Hill
260 _c2002
300 _a436
650 _aElectronics and Communication
_96024
942 _cBE_BK
999 _c4317
_d4317