00763nam a2200181Ia 4500008004100000020002200041100002300063245004900086260001400135260004700149260000900196300000900205650004000214942001000254952015100264952015100415999001500566221231s9999    xx            000 0 und d  a978-0-07-048709-3  aHsu Tai -Ran96885 0aMEMS and Microsystems Design and Manufacture  aNew Delhi  bTata McGraw-Hill Education Private Limited  c2011  a436P  aElectronics and Communication96886  cBE_BK  00104070aAITbAITd2015-06-24eMega Booksg520.00l0pBE17935r2022-12-31v520.00w2022-12-31yBE_BKzElectronics and CommunicationB1900-01-01  00104070aAITbAITd2015-06-24eMega Booksg520.00l0pBE17936r2022-12-31v520.00w2022-12-31yBE_BKzElectronics and CommunicationB1900-01-01  c4755d4755