Hsu Tai -Ran <br/><br/>
MEMS and Microsystems Design and Manufacture 

 - New Delhi  Tata McGraw-Hill Education Private Limited  2011 
 - 436P 
<br/><br/><label>ISBN: </label>978-0-07-048709-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and Communication