00743nam a2200181Ia 4500008004100000020002000041100002300061245004900084250001100133260002100144260000900165300000800174650004000182942001000222952015100232952016300383999001500546221231s9999    xx            000 0 und d  a0-07-063445-9-X  aHsu, Tai-Ran96023 0aMEMS and Microsystems Design and Manufacture  a8th Rp  bTata McGraw-Hill  c2002  a436  aElectronics and Communication96024  cBE_BK  00104070aAITbAITd2015-06-24eMega Booksg425.00l0pBE13257r2022-12-31v425.00w2022-12-31yBE_BKzElectronics and CommunicationB1900-01-01  00104070aAITbAITd2015-06-24eMega Booksg425.00l2pBE13258r2024-06-12s2024-05-30v425.00w2022-12-31yBE_BKzElectronics and CommunicationB1900-01-01  c4317d4317