Hsu, Tai-Ran <br/><br/>
MEMS and Microsystems Design and Manufacture 

 - 8th Rp 
 -  Tata McGraw-Hill  2002 
 - 436 
<br/><br/><label>ISBN: </label>0-07-063445-9-X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and Communication